Patent · US Active

Electrochemical processor

US8496790B2 · kind B2 · utility

13Cited by

7References

12Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Gregory J. Wilson · Kalispell, US
Paul R. McHugh · Kalispell, US

Key dates

Filing date	Nov 3, 2011
Grant date	Jul 30, 2013
Priority date	—
Expiry date	Jan 30, 2032

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC25D7/123
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

An electrochemical processor may include a head having a rotor configured to hold a workpiece, with the head moveable to position the rotor in a vessel. Inner and outer anodes are in inner and outer anolyte chambers within the vessel. An upper cup in the vessel, has a curved upper surface and inner and outer catholyte chambers. A current thief is located adjacent to the curved upper surface. Annular slots in the curved upper curved surface connect into passageways, such as tubes, leading into the outer catholyte chamber. Membranes may separate the inner and outer anolyte chambers from the inner and outer catholyte chambers, respectively.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.