Patent · US Active

Method for automatic generation of throughput models for semiconductor tools

US8504186B2 · kind B2 · utility

2Cited by

1References

2Claims

0Family size

Assignee

GlobalFoundries Inc. · KY

Inventors

Kilian Schmidt · Dresden, DE
Roy Boerner · Dresden, DE
Jan Lange · Neustadt, DE

Key dates

Filing date	Jan 20, 2012
Grant date	Aug 6, 2013
Priority date	—
Expiry date	Jan 20, 2032

Classification

Technology area (CPC G)Physics
CPC primaryG05B17/02
WIPO fieldControl
WIPO sectorInstruments

Abstract

The throughput of complex cluster tools of a semiconductor manufacturing environment may be determined for a desired manufacturing scenario on the basis of automatically generated throughput models. The throughput models may be established on the basis of rule messages with high statistical relevance.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.