Plasma reactor gas distribution plate with radially distributed path splitting manifold
US8512509B2 · kind B2 · utility
211Cited by
21References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 19, 2007 |
| Grant date | Aug 20, 2013 |
| Priority date | — |
| Expiry date | Jan 2, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32449
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In a showerhead assembly, a path splitting manifold comprises a gas supply inlet and a planar floor and plural gas outlets extending axially through the floor and azimuthally distributed about the floor. The path splitting manifold further comprises a plurality of channels comprising plural paths between the inlet and respective ones of the plural outlets. A gas distribution showerhead underlies the floor of the manifold and is open to the plural outlets. In certain embodiments, the plural paths are of equal lengths.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.