Methods and apparatus for tuning matching networks
US8513889B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 6, 2010 |
| Grant date | Aug 20, 2013 |
| Priority date | — |
| Expiry date | Jul 6, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/46
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Methods and apparatus for tuning matching networks are provided herein. A method of tuning a matching network includes providing a matching network coupling an RF source to a load, the matching network having a tunable element disposed at a first set point; increasing a value of the tunable element by a first step above the first set point; sensing a first adjusted value of a reflected RF power; decreasing the value of the tunable element by the first step below the first set point; sensing a second adjusted value of the reflected RF power; comparing the first and the second adjusted values of the reflected RF power; and moving the tunable element to a second set point that corresponds to a position having a lowest adjusted value of the reflected RF power. The method may be repeated until the reflected RF power falls within an acceptable reflected RF power range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.