Micromachined piezoelectric X-Axis gyroscope

US8516886B2 · kind B2 · utility

Assignee

• QUALCOMM MEMS Technologies, Inc. · US

Inventors

• Cenk Acar · Laguna Beach, US
• Ravindra V. Shenoy · San Jose, US
• Justin Phelps Black · Santa Clara, US
• Kurt Edward Petersen · Milpitas, US
• Srinivasan K. Ganapathi · San Jose, US
• Philip Jason Stephanou · Mountain View, US

Key dates

• Filing date: Dec 30, 2010
• Grant date: Aug 27, 2013
• Expiry date: Oct 13, 2031

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49155
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Such gyroscopes may include a sense frame, a proof mass disposed outside the sense frame, a pair of anchors and a plurality of drive beams. The plurality of drive beams may be disposed on opposing sides of the sense frame and between the pair of anchors. The drive beams may connect the sense frame to the proof mass. The drive beams may be configured to cause torsional oscillations of the proof mass substantially in a first plane of the drive beams. The sense frame may be substantially decoupled from the drive motions of the proof mass. Such devices may be included in a mobile device, such as a mobile display device.