Micromachined piezoelectric z-axis gyroscope

US8516887B2 · kind B2 · utility

Assignee

• QUALCOMM MEMS Technologies, Inc. · US

Inventors

• Cenk Acar · Laguna Beach, US
• Ravindra V. Shenoy · San Jose, US
• Justin Phelps Black · Santa Clara, US
• Kurt Edward Petersen · Milpitas, US
• Srinivasan K. Ganapathi · San Jose, US
• Philip Jason Stephanou · Mountain View, US

Key dates

• Filing date: Dec 30, 2010
• Grant date: Aug 27, 2013
• Expiry date: Oct 14, 2031

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49155
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Such gyroscopes may include a central anchor, a sense frame disposed around the central anchor, a plurality of sense beams configured for connecting the sense frame to the central anchor and a drive frame disposed around and coupled to the sense frame. The gyroscope may include pairs of drive beams disposed on opposing sides of the sense frame. The gyroscope may include a drive frame suspension for substantially restricting a drive motion of the drive frame to that of a substantially linear displacement along the first axis. The sense frame may be substantially decoupled from drive motions of the drive frame. Such devices may be included in a mobile device, such as a mobile display device.