Method of fabricating an optical transformer
US8520987B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 22, 2010 |
| Grant date | Aug 27, 2013 |
| Priority date | — |
| Expiry date | Dec 6, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/136
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of fabricating an optical transformer is provided. A substrate is provided first, wherein the substrate includes a first region and a second region. Then a first material layer is formed on the substrate, and the portion of the first material layer other than in the first region is removed. Then a second material layer is formed on the substrate, and the portion of the second material layer in the first region and the second region is removed. Lastly, a first conductive layer is formed on the substrate and the portion of the first conductive layer other than in the second region is removed to make the first material layer, the second material layer and the first conductive layer have the same height such that the first material layer becomes a part of the optical transformer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.