Silicon-based antireflective coating compositions

US8524441B2 · kind B2 · utility

Assignees

• AZ Electronic Materials USA Corp. · US
• BRAGGONE OY · FI

Inventors

• Ruzhi Zhang · Pennington, US
• WooKyu Kim · Bound Brook, US
• David Abdallah · Bernardsville, US
• PingHung Lu · Bound Brook, US
• Mark Neisser · Whitehouse Station, US
• Ralph R. Dammel · Flemington, US
• Ari Karkkainen · Oulu, FI

Key dates

• Filing date: Feb 25, 2008
• Grant date: Sep 3, 2013
• Expiry date: May 9, 2030

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/02282
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A polymer comprising a siloxane polymer having at least one Si—OH group and at least one Si—OR group, where R is condensation stabilizing group optionally having a reactive functional group, wherein the siloxane polymer, when placed into a solvent, has a weight average molecular weight increase of less than or equal to 50% after aging for one week at 40° C. as measured by GPC is provided.