Method and system for managing process jobs in a semiconductor fabrication facility

US8527080B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Shay Assaf · Santa Clara, US
• Venkatesh Babu · San Jose, US
• Robert D. Flores · Campbell, US
• Brendan Hickey · Melbourne, AU
• Krishna Kumar Kuttannair · San Jose, US
• Song J. Park · Pleasanton, US
• Adrian Rhee · Santa Clara, US
• Chongyang Wang · Hejian, CN

Key dates

• Filing date: Oct 2, 2008
• Grant date: Sep 3, 2013
• Expiry date: Aug 13, 2030

Classification

• Technology area (CPC G): Physics
• CPC primary: G06Q10/06
• WIPO field: IT methods for management
• WIPO sector: Electrical engineering

Abstract

A method and system for managing process jobs in a semiconductor fabrication facility is described. In one embodiment, the method includes receiving a plurality of process jobs associated with one or more priorities. The method further includes executing the plurality of process jobs in an order reflecting the priorities. The order is modifiable in real time upon receiving a new process job with a priority higher than the priorities of the plurality of process jobs.