Method and apparatus for MEMS oscillator
US8530258B2 · kind B2 · utility
1Cited by
12References
19Claims
0Family size
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Key dates
| Filing date | Oct 18, 2011 |
| Grant date | Sep 10, 2013 |
| Priority date | — |
| Expiry date | Oct 25, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02519
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A resonator includes a CMOS substrate having a first electrode and a second electrode. The CMOS substrate is configured to provide one or more control signals to the first electrode. The resonator also includes a resonator structure including a silicon material layer. The resonator structure is coupled to the CMOS substrate and configured to resonate in response to the one or more control signals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.