SLM device and method combining multiple mirrors for high-power delivery

US8531755B2 · kind B2 · utility

Assignee

• Micronic Laser Systems AB · SE

Inventors

• Torbjorn Sandstrom · Mölnlycke, SE
• Per Askebjer · Åkersberga, SE

Key dates

• Filing date: Feb 16, 2010
• Grant date: Sep 10, 2013
• Expiry date: May 29, 2031

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B26/0833
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The present invention describes a micro-mechanical light modulator including a two-dimensional array of modulating elements, in which small modulating elements are organized into larger modulating areas. Using smaller elements organized into larger areas increases the resonant frequency of the modulators and the modulation speed. In some implementations, multiple modulating elements are driven by shared signals, allowing the number of elements driven and the resulting area to increase without increasing the data traffic. In some implementations, an anamorphic optical path is used that leaves individual modulating elements of the micro-mechanical light modulator that are operated as a single area unresolved at an image plane of the workpiece being patterned. Devices and methods are described.