Inventor · Åkersberga, SE

Per Askebjer

10Patents
5h-index
14Co-inventors
59Inventor score

Filing activity: May 22, 2000 → Dec 3, 2018

Most-cited inventions

PatentTitleAreaCited byStatus
US6883158B1 Method for error reduction in lithography Physics 65 Expired
US10082030B2 Thermodynamic cycle operating at low pressure using a radial turbine Mechanical Engineering; Lighting; Heating 38 Active
US7150949B2 Further method to pattern a substrate Physics 32 Expired
US7186486B2 Method to pattern a substrate Physics 8 Expired
US8537416B2 Rotor optics imaging method and system with variable dose during sweep Physics 5 Active
US8531755B2 SLM device and method combining multiple mirrors for high-power delivery Physics 2 Active
US8861066B2 Oversized micro-mechanical light modulator with redundant elements, device and method Physics 1 Active
US11284517B2 System for direct writing on an uneven surface of a workpiece that is covered with a radiation sensitive layer using exposures having different focal planes Emerging Cross-Sectional Technologies 0 Active
US10400634B2 Heat recovery system and a method using a heat recovery system to convert heat into electrical energy Mechanical Engineering; Lighting; Heating 0 Active
US10149390B2 Maskless writing of a workpiece using a plurality of exposures having different focal planes using multiple DMDs Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.