Patent · US Active

Rotor optics imaging method and system with variable dose during sweep

US8537416B2 · kind B2 · utility

5Cited by

27References

20Claims

0Family size

Assignee

Micronic Laser Systems AB · SE

Inventors

Torbjorn Sandstrom · Mölnlycke, SE
Per Askebjer · Åkersberga, SE

Key dates

Filing date	Mar 5, 2010
Grant date	Sep 17, 2013
Priority date	—
Expiry date	Feb 10, 2032

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70783
WIPO fieldOptics
WIPO sectorInstruments

Abstract

The technology disclosed relates to translating between a Cartesian grid and a curved scanning path that produces varying exposure doses as the scanning head traces the curved scanning path. It can be applied to writing to or reading from a workpiece. In particular, we teach use of varying exposure dose that compensates for the time it takes for the curved scan path to transit a straight axis. This simplifies either modulation of a modulator, from which data is projected onto the workpiece, or analysis of data collected by a detector, onto which partial images of the workpiece are projected.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.