Precession diffraction charged particle beam system

US8541739B2 · kind B2 · utility

Assignee

• Carl Zeiss Microscopy GmbH · DE

Inventors

• Gerd Benner · Aalen, DE
• Harald Niebel · Senden, DE

Key dates

• Filing date: Jul 26, 2011
• Grant date: Sep 24, 2013
• Expiry date: Dec 8, 2031

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N23/20058
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A charged particle beam system for performing precession diffraction includes a lens 11 for focusing a beam 5 in an object plane 9, and an objective lens 13 having a diffraction plane 27. A doublet 53 of lenses 35, 63 images the diffraction plane 27 into an intermediate diffraction plane 69 where a multipole 55 is located. A doublet 57 of lenses 65, 93 images the intermediate diffraction plane 69 into an intermediate diffraction plane 71 where a multipole 59 is located. A first deflection system 15 upstream of the object plane 9 can tilt to change an angle of incidence of the beam on the object plane. A second deflection system 37 between lenses 35 and 63 tilts the beam such that the change of the angle of incidence of the charged particle beam on the object plane is compensated.