Patent · US Active

Method for continuous formation of a purified sheet from a melt

US8545624B2 · kind B2 · utility

0Cited by

32References

9Claims

0Family size

Assignee

Varian Semiconductor Equipment Associates, Inc. · US

Inventors

Peter L. Kellerman · Essex, US
Frank Sinclair · Quincy, US
Frederick M. Carlson · Potsdam, US

Key dates

Filing date	Jun 18, 2009
Grant date	Oct 1, 2013
Priority date	—
Expiry date	Jun 17, 2032

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC30B29/60
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

An apparatus to pump a melt is disclosed. The pump has a chamber that defines a cavity configured to hold the melt. A gas source is in fluid communication with the chamber. A first valve is between the chamber and a first pipe and a second valve is between the chamber and a second pipe. The valves may be check valves in one embodiment.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.