Bow-balanced 3D chip stacking
US8546188B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 9, 2010 |
| Grant date | Oct 1, 2013 |
| Priority date | — |
| Expiry date | Dec 20, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/3511
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A first set of semiconductor substrates includes semiconductor chips having bonding pads arranged in a primary pattern. A second set of semiconductor substrates includes semiconductor chips having bonding pads arranged in a mirror-image pattern. A first semiconductor substrate from the first set is bonded to a second semiconductor substrate from the second set such that each bonding pads is bonded to a mirror-image bonding pad. Additional substrates are bonded sequentially such that the bonded structure includes an even number of semiconductor substrates of which one half have bonding pads of the primary pattern and are bonded to the side of the first semiconductor substrate, while the other half have bonding pads of the mirror-image pattern and are bonded to the side of the second semiconductor substrate. The mirror-image patterns of the bonding pads enable maximal cancellation of wafer bow.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.