Inventor · Poughkeepsie, NY, US

Roy R. Yu

15Patents

4h-index

28Co-inventors

60Inventor score

Filing activity: Dec 22, 1999 → Nov 4, 2021

Most-cited inventions

Patent	Title	Area	Cited by	Status
US8129256B2	3D integrated circuit device fabrication with precisely controllable substrate removal	Electricity	249	Active
US8546188B2	Bow-balanced 3D chip stacking	Electricity	62	Active
US6339527B1	Thin film capacitor on ceramic	Electricity	25	Expired
US8298914B2	3D integrated circuit device fabrication using interface wafer as permanent carrier	Electricity	5	Active
US8492869B2	3D integrated circuit device having lower-cost active circuitry layers stacked before higher-cost active circuitry layer	Electricity	4	Active
US8664081B2	Method for fabricating 3D integrated circuit device using interface wafer as permanent carrier	Electricity	1	Active
US8629553B2	3D integrated circuit device fabrication with precisely controllable substrate removal	Electricity	1	Active
US8399336B2	Method for fabricating a 3D integrated circuit device having lower-cost active circuitry layers stacked before higher-cost active circuitry layer	Electricity	1	Active
US11915966B2	Backside power rail integration	Electricity	0	Active
US12106969B2	Substrate thinning for a backside power distribution network	Electricity	0	Active
US9171742B2	Alignment of integrated circuit chip stack	Electricity	0	Active
US12002758B2	Backside metal-insulator-metal (MIM) capacitors extending through backside interlayer dielectric (BILD) layer or semiconductor layer and partly through dielectric layer	Electricity	0	Active
US8738167B2	3D integrated circuit device fabrication with precisely controllable substrate removal	Electricity	0	Active
US8962448B2	Computer readable medium encoded with a program for fabricating 3D integrated circuit device using interface wafer as permanent carrier	Electricity	0	Active
US12136655B2	Backside electrical contacts to buried power rails	Electricity	0	Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.