Simulating a chemical reaction phenomenon in a semiconductor process
US8548787B2 · kind B2 · utility
1Cited by
2References
9Claims
0Family size
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Key dates
| Filing date | Nov 6, 2006 |
| Grant date | Oct 1, 2013 |
| Priority date | — |
| Expiry date | Feb 16, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F2111/08
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A calculating unit calculates either one of a reaction probability between a chemical species used in a semiconductor process and a semiconductor device and a deactivation probability of the chemical species, according to either one of a structure of the semiconductor device and a plurality of materials. A simulation unit performs a simulation of a physical phenomenon occurring in a reaction chamber based on either one of the reaction probability and the deactivation probability.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.