Capacitor having a plurality of parallel conductive members

US8569820B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Hans-Joachim Barth · Munich, DE
• Erwin Ruderer · Borgo San Lazzaro, DE
• Alexander Von Glasow · Kleinmachnow, DE
• Philipp Riess · Munich, DE
• Erdem Kaltalioglu · Newburgh, US
• Peter Baumgartner · Munich, DE
• Thomas Benetik · Munich, DE
• Helmut Tews · Poughkeepsie, US

Key dates

• Filing date: Jan 6, 2012
• Grant date: Oct 29, 2013
• Expiry date: Jan 6, 2032

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2924/0002
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

Semiconductor devices and methods of manufacture thereof are disclosed. In one embodiment, a capacitor plate includes a plurality of first parallel conductive members, and a plurality of second parallel conductive members disposed over the plurality of first parallel conductive members. A first base member is coupled to an end of the plurality of first parallel conductive members, and a second base member is coupled to an end of the plurality of second parallel conductive members. A connecting member is disposed between the plurality of first parallel conductive members and the plurality of second parallel conductive members, wherein the connecting member includes at least one elongated via.