Patent · US Active

Optical assembly

US8570676B2 · kind B2 · utility

0Cited by

15References

29Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Hermann Bieg · Wertingen, DE
Karl-Eugen Aubele · Geislingen an der Steige, DE
Yim-Bun Patrick Kwan · Aalen, DE
Stefan Xalter · Oberkochen, DE
Martin Schmidt · Windisch, CH
Saverio Sanvido · Glattbrugg, CH
Uy-Liem Nguyen · Wetzikon, CH

Key dates

Filing date	Mar 11, 2011
Grant date	Oct 29, 2013
Priority date	—
Expiry date	Jul 17, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG02B7/1827
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An optical assembly supported in an arrangement, especially in an objective or in an illuminating or exposure system, in the interior of a housing comprising at least one optical element, especially a lens, a mirror, or an aperture, wherein the at least one element is influenceable by at least one manipulator is characterized in that the at least one manipulator is arranged either outside of the housing or in a holding means that is separated entirely or to a large extent by the help of a decoupling means, and that there is provided an effective coupling between the manipulator and the element to be influenced by the manipulator in the interior of the arrangement.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.