Optical member-holding apparatus, method for adjusting position of optical member, and exposure apparatus
US8576375B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 29, 2008 |
| Grant date | Nov 5, 2013 |
| Priority date | — |
| Expiry date | Feb 11, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70833
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
There is provided is an optical member-holding apparatus which can hold a plurality of optical members of two different optical systems, even when the optical members exist in a common barrel in a mixed manner, such that the relative positions between the optical members can be easily adjusted; and which holds a mirror in a projection optical system and a mirror in an illumination optical system and includes a barrel unit, an inner ring holding the mirror, a holding member holding the mirror, a support plate attached to the barrel unit, and a holding-supporting mechanism attached to the support plate and adjusting the relative position of the mirror to the mirror.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.