Semiconductor device and manufacturing method thereof
US8580652B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 3, 2010 |
| Grant date | Nov 12, 2013 |
| Priority date | — |
| Expiry date | Feb 13, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/3025
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
According to one embodiment, a manufacturing method of a semiconductor device is disclosed. The semiconductor device includes a semiconductor substrate having first and second main surfaces, and a through hole passing through between the first and second main surfaces, a pad on the first main surface, a through electrode in the through hole, and a connection structure including a connection portion to directly connect the pad and the through electrode, and another connection portion to indirectly connect the pad and the through electrode. The method includes forming an isolation region in the first main surface, the isolation region being in a region where the through electrode is to be formed and being in a region other than the region where the through hole is to be formed, forming the pad, and forming the through hole by processing the substrate to expose a part of the pad.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.