Micromachined piezoelectric x-axis gyroscope

US8584522B2 · kind B2 · utility

Assignee

• QUALCOMM MEMS Technologies, Inc. · US

Inventors

• Cenk Acar · Laguna Beach, US
• Ravindra V. Shenoy · San Jose, US
• Justin Phelps Black · Santa Clara, US
• Kurt Edward Petersen · Milpitas, US
• Srinivasan K. Ganapathi · San Jose, US
• Philip Jason Stephanou · Mountain View, US

Key dates

• Filing date: Dec 30, 2010
• Grant date: Nov 19, 2013
• Expiry date: Oct 18, 2031

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49155
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Some gyroscopes include a drive frame, a central anchor and a plurality of drive beams disposed on opposing sides of the central anchor. The drive beams may connect the drive frame to the central anchor. The drive beams may include a piezoelectric layer and may be configured to cause the drive frame to oscillate torsionally in a plane of the drive beams. The gyroscope may also include a proof mass and a plurality of piezoelectric sense beams. At least some components may be formed from plated metal. The drive frame may be disposed within the proof mass. The drive beams may constrain the drive frame to rotate substantially in the plane of the drive beams. Such devices may be included in a mobile device, such as a mobile display device.