Near-infrared absorbing film compositions
US8586283B2 · kind B2 · utility
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23References
17Claims
0Family size
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Key dates
| Filing date | Sep 10, 2012 |
| Grant date | Nov 19, 2013 |
| Priority date | — |
| Expiry date | Sep 10, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/7026
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A curable liquid formulation containing at least (i) one or more near-infrared absorbing triphenylamine-based dyes, and (ii) one or more casting solvents. The invention is also directed to solid near-infrared absorbing films composed of crosslinked forms of the curable liquid formulation. The invention is also directed to a microelectronic substrate containing a coating of the solid near-infrared absorbing film as well as a method for patterning a photoresist layer coated on a microelectronic substrate in the case where the near-infrared absorbing film is between the microelectronic substrate and a photoresist film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.