Libor Vyklicky
16Patents
4h-index
27Co-inventors
56Inventor score
Filing activity: Jun 23, 2006 → Dec 5, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7588879B2 | Graded spin-on organic antireflective coating for photolithography | Emerging Cross-Sectional Technologies | 7 | Active |
| US8546062B2 | Self-forming top anti-reflective coating compositions and, photoresist mixtures and method of imaging using same | Chemistry; Metallurgy | 6 | Active |
| US7816069B2 | Graded spin-on organic antireflective coating for photolithography | Emerging Cross-Sectional Technologies | 4 | Active |
| US8293451B2 | Near-infrared absorbing film compositions | Physics | 4 | Active |
| US8137874B2 | Organic graded spin on BARC compositions for high NA lithography | Physics | 4 | Active |
| US8182978B2 | Developable bottom antireflective coating compositions especially suitable for ion implant applications | Physics | 3 | Active |
| US8772376B2 | Near-infrared absorbing film compositions | Emerging Cross-Sectional Technologies | 2 | Active |
| US8097401B2 | Self-forming top anti-reflective coating compositions and, photoresist mixtures and method of imaging using same | Chemistry; Metallurgy | 2 | Active |
| US8652762B2 | Organic graded spin on BARC compositions for high NA lithography | Physics | 2 | Active |
| US9726977B2 | Coating compositions suitable for use with an overcoated photoresist | Physics | 1 | Active |
| US9465290B2 | Near-infrared absorbing film compositions | Emerging Cross-Sectional Technologies | 1 | Active |
| US9981965B2 | Process for preparing idelalisib | Chemistry; Metallurgy | 0 | Active |
| US8586283B2 | Near-infrared absorbing film compositions | Physics | 0 | Active |
| US11390593B2 | Process for preparing ozanimod | Chemistry; Metallurgy | 0 | Active |
| US9012133B2 | Removal of alkaline crystal defects in lithographic patterning | Physics | 0 | Active |
| US8557501B2 | Developable bottom antireflective coating compositions especially suitable for ion implant applications | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.