Inventor · Yorktown Heights, NY, US

Libor Vyklicky

16Patents
4h-index
27Co-inventors
56Inventor score

Filing activity: Jun 23, 2006 → Dec 5, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US7588879B2 Graded spin-on organic antireflective coating for photolithography Emerging Cross-Sectional Technologies 7 Active
US8546062B2 Self-forming top anti-reflective coating compositions and, photoresist mixtures and method of imaging using same Chemistry; Metallurgy 6 Active
US7816069B2 Graded spin-on organic antireflective coating for photolithography Emerging Cross-Sectional Technologies 4 Active
US8293451B2 Near-infrared absorbing film compositions Physics 4 Active
US8137874B2 Organic graded spin on BARC compositions for high NA lithography Physics 4 Active
US8182978B2 Developable bottom antireflective coating compositions especially suitable for ion implant applications Physics 3 Active
US8772376B2 Near-infrared absorbing film compositions Emerging Cross-Sectional Technologies 2 Active
US8097401B2 Self-forming top anti-reflective coating compositions and, photoresist mixtures and method of imaging using same Chemistry; Metallurgy 2 Active
US8652762B2 Organic graded spin on BARC compositions for high NA lithography Physics 2 Active
US9726977B2 Coating compositions suitable for use with an overcoated photoresist Physics 1 Active
US9465290B2 Near-infrared absorbing film compositions Emerging Cross-Sectional Technologies 1 Active
US9981965B2 Process for preparing idelalisib Chemistry; Metallurgy 0 Active
US8586283B2 Near-infrared absorbing film compositions Physics 0 Active
US11390593B2 Process for preparing ozanimod Chemistry; Metallurgy 0 Active
US9012133B2 Removal of alkaline crystal defects in lithographic patterning Physics 0 Active
US8557501B2 Developable bottom antireflective coating compositions especially suitable for ion implant applications Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.