Patent · US Active

Transmission electron microscope

US8598526B2 · kind B2 · utility

1Cited by

5References

19Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventor

Gerd Benner · Aalen, DE

Key dates

Filing date	Feb 28, 2011
Grant date	Dec 3, 2013
Priority date	—
Expiry date	Jun 20, 2032

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2803
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A transmission electron microscope in which a sample is positioned in a sample plane 9b comprises an objective lens 11b, a first projection lens system 61b having plural lenses, a second projection lens 63b system having plural lenses, and an analyzing system.The sample plane 9b is imaged into an intermediate image plane 71, a diffraction plane 15b of the objective lens 11b is imaged into an intermediate diffraction plane 67b, and either

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.