Electrolyte loop with pressure regulation for separated anode chamber of electroplating system

US8603305B2 · kind B2 · utility

Assignee

• Novellus Systems, Inc. · US

Inventors

• Robert Rash · Portland, US
• Richard Abraham · Sherwood, US
• David W. Porter · Tulsa, US
• Steven T. Mayer · Lake Oswego, US

Key dates

• Filing date: Mar 18, 2011
• Grant date: Dec 10, 2013
• Expiry date: Oct 30, 2031

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C25D21/18
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

An electrolyte, and particularly anolyte, may be circulated via an open loop having a pressure regulator, so that the pressure in the plating chamber is maintained at a constant (or substantially constant) value with respect to atmospheric pressure. In these embodiments, a pressure regulator is in fluid communication with the anode chamber.