Semiconductor device property extraction, generation, visualization, and monitoring methods
US8611639B2 · kind B2 · utility
24Cited by
32References
38Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 30, 2007 |
| Grant date | Dec 17, 2013 |
| Priority date | — |
| Expiry date | Jun 8, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/9501
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Various methods, carrier media, and systems for monitoring a characteristic of a specimen are provided. One computer-implemented method for monitoring a characteristic of a specimen includes determining a property of individual pixels on the specimen using output generated by inspecting the specimen with an inspection system. The method also includes determining a characteristic of individual regions on the specimen using the properties of the individual pixels in the individual regions. The method further includes monitoring the characteristic of the specimen based on the characteristics of the individual regions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.