Time differential reticle inspection
US8623576B2 · kind B2 · utility
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1References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 16, 2010 |
| Grant date | Jan 7, 2014 |
| Priority date | — |
| Expiry date | Jul 28, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/7065
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Disclosed are systems and methods for time differential reticle inspection. Contamination is detected by, for example, determining a difference between a first signature of at least a portion of a reticle and a second signature, produced subsequent to the first signature, of the portion of the reticle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.