Controlling spatial properties in an excimer ring amplifier
US8624209B1 · kind B1 · utility
6Cited by
13References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 14, 2013 |
| Grant date | Jan 7, 2014 |
| Priority date | — |
| Expiry date | Mar 14, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/106
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A deep ultraviolet light source includes a master oscillator producing a seed light beam; a regenerative ring amplifier receiving the seed light beam from the master oscillator and outputting an output light beam, the regenerative ring amplifier including a set of optical components that define a plane of a closed ring; and a divergence control device within the master oscillator or between the master oscillator and the regenerative ring amplifier and configured to reduce a divergence of the output light beam along a normal direction, the normal direction being perpendicular to the plane of the ring.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.