Method for centering an optical element in a TEM comprising a contrast enhancing element
US8633456B2 · kind B2 · utility
4Cited by
7References
20Claims
0Family size
Assignee
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Key dates
| Filing date | Feb 6, 2012 |
| Grant date | Jan 21, 2014 |
| Priority date | — |
| Expiry date | Jul 29, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2614
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method for adjusting or aligning one or more optical elements in a Transmission Electron Microscope (TEM) is disclosed. The TEM is equipped with an objective lens for guiding a beam of electrons to a sample, a diffraction plane in which at least a beam of unscattered electrons is focused and a structure to enhance the Contrast Transfer Function (CTF) which is situated in the diffraction plane or an image thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.