Patent · US Active

Stage drive device

US8638026B2 · kind B2 · utility

0Cited by

6References

17Claims

0Family size

Assignee

Hitachi High-Technologies Corporation · JP

Inventors

Masashi Shibahara
Mikio Tokuyama · Tsukuba, JP
Koichiro Takeuchi · Hitachinaka, JP
Shigeru Haneda · Yokohama, JP
Osamu Yamada · Hitachinaka, JP
Naoki Sakamoto · Wako, JP
Eiichi Hazaki · Tsuchiura, JP
Akito Tanokuchi · Tokyo, JP

Key dates

Filing date	Oct 6, 2009
Grant date	Jan 28, 2014
Priority date	—
Expiry date	Dec 8, 2029

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49826
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A stage comprises a linear guide rail (2) for guiding a movable table (4), a driven bar (12), a linear drive actuator in contact with the driven bar (12) to transmit driving force to the driven bar (12), and parallel plate springs (30) for holding opposite ends of the driven bar (12). A drive transmitting surface of the linear drive actuator is provided so as to be separated from the movable table (4), and this prevents the accuracy of positioning from being reduced. Also, the parallel springs (30) reduce deforming forces applied to sections supporting the driven bar (12), and this prevents the driven bar from being damaged. The configuration makes the stage highly accurate and highly reliable.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.