Method of generating a recipe for a manufacturing tool and system thereof
US8640060B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 29, 2012 |
| Grant date | Jan 28, 2014 |
| Priority date | — |
| Expiry date | May 29, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/9501
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is provided a computer-implemented method of creating a recipe for a manufacturing tool and a system thereof. The method comprises: upon obtaining data characterizing periodical sub-arrays in one or more dies, generating candidate stitches; identifying one or more candidate stitches characterized by periodicity characteristics satisfying, at least, a periodicity criterion, thereby identifying periodical stitches among the candidate stitches; and aggregating the identified periodical stitches and the periodical sub-arrays into periodical arrays, said periodical arrays to be used for automated recipe creation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.