Encapsulation of electrodes in solid media for use in conjunction with fluid high voltage isolation
US8642974B2 · kind B2 · utility
4Cited by
72References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 21, 2011 |
| Grant date | Feb 4, 2014 |
| Priority date | — |
| Expiry date | Sep 5, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/4652
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An inductively-coupled plasma source for a focused charged particle beam system includes a conductive shield that provides improved electrical isolation and reduced capacitive RF coupling and a dielectric fluid that insulates and cools the plasma chamber. The conductive shield may be enclosed in a solid dielectric media. The dielectric fluid may be circulated by a pump or not circulated by a pump. A heat tube can be used to cool the dielectric fluid.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.