Particle beam system having a hollow light guide
US8648301B2 · kind B2 · utility
2Cited by
10References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 20, 2012 |
| Grant date | Feb 11, 2014 |
| Priority date | — |
| Expiry date | Sep 20, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2808
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A system includes a particle optical system and a photosensitive detector. The particle optical system includes a charged particle beam source and an objective lens. The charged particle beam source is configured to generate a charged particle beam that travels along a particle beam path, and the objective lens is configured to focus the particle beam onto an object plane of the particle optical system. The system is configured such that a light beam path of the system extends from the object plane to the photosensitive detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.