Apparatus and method for measuring ion beam current
US8653807B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 22, 2010 |
| Grant date | Feb 18, 2014 |
| Priority date | — |
| Expiry date | Dec 1, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/404
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Techniques for ion beam current measurement, especially for measuring low energy ion beam current, are disclosed. In one exemplary embodiment, the techniques may be realized as an ion beam current measurement apparatus has at least a planar Faraday cup and a magnet device. The planar Faraday cup is close to an inner surface of a chamber wall, and may be non-parallel to or parallel to the inner surface. The magnet device is located close to the planar Faraday cup. Therefore, by properly adjusting the magnetic field, secondary electrons, incoming electrons and low energy ions may be adequately suppressed. Further, the planar Faraday cup may surround an opening of an additional Faraday cup being any conventional Faraday cup. Therefore, the whole ion beam may be received and measured well by the larger cross-section area of at least the planar Faraday cup on the ion beam path.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.