Solution supplying unit and substrate treating apparatus having the same
US8673110B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 10, 2011 |
| Grant date | Mar 18, 2014 |
| Priority date | — |
| Expiry date | Jun 1, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87571
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A solution supplying unit includes a body, a first supplying tube and a second supplying tube. The body includes a chamber having a substantially circular cross-section to receive a solution and an out-flowing part connected to the chamber to flow out the solution. The first supplying tube is disposed at a side of the body, tangentially connected to the chamber, and supplying a first solution into the chamber to rotate the first solution in the chamber. The second supplying tube has an end portion, and supplying a second solution into the chamber to mix the first solution with the second solution. The end portion is formed through the body and is adjacent to a central axis of the body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.