Gui Su PARK
11Patents
1h-index
36Co-inventors
50Inventor score
Filing activity: Mar 10, 2011 → Nov 4, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11765793B2 | Substrate treating apparatus | Electricity | 1 | Active |
| US11232942B2 | Substrate treating method and substrate treating apparatus | Electricity | 1 | Active |
| US10283390B2 | Apparatus for processing substrate | Electricity | 1 | Active |
| US11721575B2 | Substrate support unit and substrate treating apparatus having the same | Electricity | 1 | Active |
| US8673110B2 | Solution supplying unit and substrate treating apparatus having the same | Emerging Cross-Sectional Technologies | 1 | Active |
| US12278121B2 | Support unit, substrate treating apparatus including the same, and substrate treating method | Electricity | 0 | Active |
| US11869778B2 | Liquid supply unit, and apparatus and method for processing substrate | Chemistry; Metallurgy | 0 | Active |
| US12412767B2 | Apparatus for treating substrate and method for treating substrate | Performing Operations; Transporting | 0 | Active |
| US11794220B2 | Fluid supply unit and substrate treating apparatus having the same | Electricity | 0 | Active |
| US10825699B2 | Standby port and substrate processing apparatus having the same | Electricity | 0 | Active |
| US11594421B2 | Substrate treating apparatus and substrate treating method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.