Castle-like chop mask for forming staggered datalines for improved contact isolation and pattern thereof
US8674522B1 · kind B1 · utility
7Cited by
1References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 11, 2012 |
| Grant date | Mar 18, 2014 |
| Priority date | — |
| Expiry date | Oct 11, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10B12/488
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention provides a castle-like shaped protect or a periphery protect or a DC chop mask for forming staggered data line patterns in semiconductor devices so as to shift the adjacent data lines from one another so as to print contacts with larger areas at one end of each data line.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.