Trench gated power device with multiple trench width and its fabrication process
US8680607B2 · kind B2 · utility
8Cited by
22References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 18, 2012 |
| Grant date | Mar 25, 2014 |
| Priority date | — |
| Expiry date | Jun 30, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D64/516
Abstract
Power devices, and related process, where both gate and field plate trenches have multiple stepped widths, using self-aligned process steps.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.