Coil, positioning device, actuator, and lithographic apparatus
US8680721B2 · kind B2 · utility
0Cited by
8References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 2, 2010 |
| Grant date | Mar 25, 2014 |
| Priority date | — |
| Expiry date | Oct 2, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K2201/18
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A positioning device includes a planar motor having a stator and a translator, one of the stator and the translator including a periodic magnet structure and another of the stator and the translator including at least one coil that is adapted to carry an electric current, wherein the coil includes a wound strip of sheet-like electrically conductive material, and wherein an edge of the coil is provided with a rounded profile.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.