Tom Van Zutphen
17Patents
3h-index
26Co-inventors
56Inventor score
Filing activity: Nov 12, 1993 → Jun 2, 2010
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5444328A | Electron tube comprising a semiconductor cathode | Electricity | 13 | Expired |
| US8368032B2 | Radiation source, lithographic apparatus, and device manufacturing method | Physics | 5 | Active |
| US6064074A | Semiconductor cathode and electron tube comprising a semiconductor cathode | Electricity | 4 | Expired |
| US5880481A | Electron tube having a semiconductor cathode with lower and higher bandgap layers | Electricity | 3 | Expired |
| US7999912B2 | Lithographic apparatus and sensor calibration method | Physics | 3 | Active |
| US6552485B2 | Electron tube comprising a semiconductor cathode | Electricity | 2 | Expired |
| US7830495B2 | Lithographic apparatus and position sensor | Physics | 2 | Active |
| US6198210A | Electron tube having a semiconductor cathode with lower and higher bandgap layers | Electricity | 2 | Expired |
| US5604355A | Electron tube comprising a semiconductor cathode | Electricity | 2 | Expired |
| US6262527A | Cathode ray tube with a getter coating in the vicinity of a semiconductor cathode | Electricity | 1 | Expired |
| US5850087A | Electron tube comprising a semiconductor cathode | Electricity | 1 | Expired |
| US5831380A | Electron-optical device | Electricity | 1 | Expired |
| US8384879B2 | Optical position sensor, a position sensitive detector, a lithographic apparatus and a method for determining an absolute position of a movable object to be used in a relative position measurement system | Physics | 1 | Active |
| US5864201A | Electron-optical device having separate elongate electron-emitting regions | Electricity | 1 | Expired |
| US8680721B2 | Coil, positioning device, actuator, and lithographic apparatus | Electricity | 0 | Active |
| US6236154A | Electron tube with a cesium source | Electricity | 0 | Expired |
| US6310434A | Picture display device having an improved bandwidth | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.