Methods and materials for removing metals in block copolymers
US8686109B2 · kind B2 · utility
8Cited by
5References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 9, 2012 |
| Grant date | Apr 1, 2014 |
| Priority date | — |
| Expiry date | Apr 10, 2032 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08J3/00
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present invention relates to a method for treating a block copolymer solution, wherein the method comprises: providing a solution comprising a block copolymer in a non aqueous solvent; and, treating the solution to remove metals using an ion exchange resin. The invention also relates to a method of forming patterns using the treated block copolymer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.