Methods and loadport for purging a substrate carrier
US8689812B2 · kind B2 · utility
17Cited by
6References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 6, 2012 |
| Grant date | Apr 8, 2014 |
| Priority date | — |
| Expiry date | Sep 6, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/0396
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In a first aspect, a substrate carrier is provided that includes an enclosure adapted to be sealable and to house at least one substrate. The substrate carrier includes a first port leading into the enclosure and adapted to allow a flow of gas into the enclosure while the substrate carrier is closed. Numerous other aspects are provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.