Structure with a moving portion and a buried electrode for movement detection included in a multi-substrate configuration
US8692337B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jul 11, 2012 |
| Grant date | Apr 8, 2014 |
| Priority date | — |
| Expiry date | Jul 11, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/83805
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device being a micro-system and/or a nano-system which includes a first substrate, having at least one lower electrode and at least one dielectric layer, and includes an intermediate substrate extending across a main plane of the device and including a moving portion. The intermediate substrate is attached, outside the moving portion, by molecular bonding to the first substrate. The moving portion faces at least a portion of the lower electrode. The device also includes an upper substrate, attached to the intermediate substrate. The moving portion is movable between the lower electrode and the upper substrate. The first, intermediate, and upper substrates extend in a plane parallel to the main plane of the device. The lower electrode detects a component of the movement of the moving portion perpendicular to the plane of the device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.