Composite showerhead electrode assembly for a plasma processing apparatus
US8701268B2 · kind B2 · utility
9Cited by
84References
21Claims
0Family size
Assignee
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Key dates
| Filing date | Mar 14, 2013 |
| Grant date | Apr 22, 2014 |
| Priority date | — |
| Expiry date | Mar 14, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/1062
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
A method of forming an elastomeric sheet adhesive bond between mating surfaces of an electrode and a backing member to accommodate stresses generated during temperature cycling due to mismatch in coefficients of thermal expansion. The elastomeric sheet comprises a thermally conductive silicone adhesive able to withstand a high shear strain of ≧300% in a temperature range of room temperature to 300° C. such as heat curable high molecular weight dimethyl silicone with fillers. Installation can be manually, manually with installation tooling, or with automated machinery.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.