Tom Stevenson
13Patents
6h-index
16Co-inventors
63Inventor score
Filing activity: Dec 20, 1995 → Aug 4, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9873940B2 | Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus | Emerging Cross-Sectional Technologies | 16 | Active |
| US8449786B2 | Film adhesive for semiconductor vacuum processing apparatus | Emerging Cross-Sectional Technologies | 11 | Active |
| US5588713A | Process for making sodium bicarbonate from Nahcolite-rich solutions | Emerging Cross-Sectional Technologies | 10 | Expired |
| US8701268B2 | Composite showerhead electrode assembly for a plasma processing apparatus | Emerging Cross-Sectional Technologies | 9 | Active |
| US9123651B2 | Dense oxide coated component of a plasma processing chamber and method of manufacture thereof | Emerging Cross-Sectional Technologies | 6 | Active |
| US8529729B2 | Plasma processing chamber component having adaptive thermal conductor | Emerging Cross-Sectional Technologies | 6 | Active |
| US8418649B2 | Composite showerhead electrode assembly for a plasma processing apparatus | Emerging Cross-Sectional Technologies | 4 | Active |
| US9546432B2 | Dense oxide coated component of a plasma processing chamber and method of manufacture thereof | Emerging Cross-Sectional Technologies | 3 | Active |
| US8679288B2 | Showerhead electrode assemblies for plasma processing apparatuses | Electricity | 3 | Active |
| US9899228B2 | Showerhead electrode assemblies for plasma processing apparatuses | Electricity | 2 | Active |
| US8975817B2 | Pressure controlled heat pipe temperature control plate | Electricity | 1 | Active |
| US9028646B2 | Film adhesive for semiconductor vacuum processing apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
| US8906164B2 | Methods for stabilizing contact surfaces of electrostatic chucks | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.