Patent · US Active

MEMS substrates, devices, and methods of manufacture thereof

US8703516B2 · kind B2 · utility

0Cited by

12References

28Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventor

Florian Schoen · Altdorf, DE

Key dates

Filing date	Jul 15, 2008
Grant date	Apr 22, 2014
Priority date	—
Expiry date	Feb 2, 2029

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C1/00507
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

Micro-electromechanical system (MEMS) substrates, devices, and methods of manufacture thereof are disclosed. In one embodiment, a MEMS device includes a workpiece having an isolation ring in a top portion thereof, and a moveable element disposed within the isolation ring.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.