High NA catadioptric imaging optics for imaging A reticle to a pair of imaging locations
US8705170B2 · kind B2 · utility
12Cited by
8References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 25, 2009 |
| Grant date | Apr 22, 2014 |
| Priority date | — |
| Expiry date | Feb 9, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70833
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
New and useful concepts for an imaging optical system configured to simultaneously image a reticle to a pair of imaging locations are provided, where the imaging optics comprise a pair of arms, each of which includes catadioptric imaging optics. In addition, the imaging optics are preferably designed to image a reticle simultaneously to the pair of imaging locations, at a numerical aperture of at least 1.3, and without obscuration of light by the imaging optics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.