Method and system for imaging a cross section of a specimen
US8709269B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 15, 2008 |
| Grant date | Apr 29, 2014 |
| Priority date | — |
| Expiry date | May 26, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N1/32
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and a system for obtaining an image of a cross section of a specimen, the method includes: milling the specimen so as to expose a cross section of the specimen, in which the cross section comprises at least one first portion made of a first material and at least one second portion made of a second material; smoothing the cross section; performing gas assisted etching of the cross section so as generate a topography difference between the at least one first portion and the at least one second portion of the cross section; coating the cross section with a thin layer of conductive material; and obtaining an image of the cross section; wherein the milling, smoothing, performing, coating and obtaining are performed while the specimen is placed in a vacuum chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.